Hakuto 离子蚀刻机 IBE

产品描述

上海伯东日本原装进口离子蚀刻机 IBE 包含小型离子蚀刻机用于研究分析和大型离子蚀刻系统用于生产制造. Hakuto 离子蚀刻系统对磁性材料, 黄金, 铂和合金金属提供较佳蚀刻技术. 它很容易做各种材料的蚀刻.

上海伯东是日本伯东 Hakuto 离子蚀刻机 IBE 中国总代理

Hakuto 离子蚀刻机 IBE 技术参数：

Hakuto 离子蚀刻机 IBE 技术规格:

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型号

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离子蚀刻机 7.5IBE

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离子蚀刻机 10IBE

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离子蚀刻机 20IBE-C

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离子蚀刻机 20IBE-J

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适用范围

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适用于科研院所,实验室研究

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适合小规模量产使用和实验室研究

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适合中等规模量产使用的离子刻蚀机

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适合大规模量产使用的离子刻蚀机

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基片尺寸

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Φ4 X 1片或
Φ6 X 1片

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Φ8 X 1片

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Φ3 inch X 8片
Φ4 inch X 6片
Φ8 inch X 1片

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Φ4 inch X 12片
Φ5 inch X 10片
Φ6 inch X 8片

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离子源

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8cm 或 10cm
考夫曼离子源

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10cm 考夫曼离子源

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20cm 考夫曼离子源

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20cm 考夫曼离子源

Hakuto 离子蚀刻机 IBE 应用领域：

Hakuto 离子蚀刻系统 IBE 主要应用：
1.薄膜磁头 Thin film Magnetic Head
2.自旋电子学 Spi***onics
3.MR Sencer
4.微电子机械系统 MEMS Micro-electromechanical Systems
5.射频设备 RF Devices
6.光学组件 Optical Component
7.超导电性 Super Conductivity